High vacuum processing with maximum access

One of our basic design rules for continuous coating says: “everything that doesn’t belong in vacuum has to go out”.

The TapeGate allows continuous vacuum transfer of substrate foil with maximum access to the stocked material, and permanent quality control of the coating result. Only the real vacuum process takes place inside the vacuum chamber. This reduces the risk of failure and down time.

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Smart equipment & vacuum solutions

THEVA has years of experience in design and construction of customized PVD equipment for production and research.

To meet customer requirements perfectly, we place emphasis on intelligent, functional design, rather than off-the-shelf solutions.

Our equipment is in the field worldwide. (cf. references). Hence, for us reliability and quality are of paramount importance. We use exclusively premium components and products developed in-house (Smart E-vaporator, TapeGate^TM, drives for substrate tape etc.).

Examples

Cluster systems for research & development

For laboratories at universities and research institutes we design multi-functional systems and clusters up to the UHV-level for various deposition and analytic purposes. On request, we implement load locks, substrate transfer and substrate holders including heating and cooling. To define simple patterns by shadow masks we also offer integrated mask changers.

The TACOMA-series – production technology for reel to reel tape coating

Throughput, reliability and automation are in the focus of our TACOMA^TM production systems. For tape coating we have chosen to place the entire material supply and storage outside the vacuum chamber. The tape substrate is locked in and out through a patented transfer unit (TapeGate^TM) without touching the sensitive tape surface. The coating material is delivered as a wire to the crucible evaporator from outside as well. Thus, we can use reliable standard drives throughout the entire system.  Within the processing chamber the tape is wound in many loops through a tape winder to achieve maximum material yield. The entire system runs fully automatic based on a SPC.